真空科技与应用展览分类
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1. 基片夹具Substrate Fixture 2. 靶材安装夹具Target Mounting Fixture 3. 基片预处理治具Substrate Preprocessing Jig
4. 维护与校准治具Maintenance and Calibration of Jigs
5. 真空镀膜室挡板Vacuum Coating Chamber Baffle 6. 异形基片专用治具Special Fixture for Irregular Substrates
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