| 靶材产品系列 | Target Product Series |
1. 按形状分类 | Classified by Shape
| A. 平面靶材/Planar Target | B. 旋转靶材/Rotary Target | C.管状靶材/Tubular Target | D. 异型靶材/Special-Shaped Target |
2. 按材质分类 | Classified by Material
| A. 纯金属靶材/Pure Metal Target | B. 合金靶材/Alloy Target | C. 陶瓷靶材/Ceramic Target | D. 复合靶材/Composite Target |
3. 靶材配件 | Target Accessories
| A. 靶材背板/Target Backing Plate | B. 靶材背板/Target Backing Plate | C. 固定装置/Fixing Device |
| 蒸发材料系列（部分）| Evaporation Material Series (Partial) |
1. 金属蒸发料 | Metal Evaporation Materials
| A. 颗粒状/Granular | B. 线材/Wire | C. 片材/Sheet | D. 丸状/Pellet |
2.化合物蒸发料 | Compound Evaporation Materials
A. 氧化物/Oxides | B. 氟化物/Fluorides | C. 硫化物/Sulfides |
D. 硼化物/Borides
| E. 氮化物/Nitrides | F. 混合物/Mixtures |
| G. 其他/Others |
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3. 蒸发源配件 | Evaporation Source Accessories
| A. EB电子枪/EB Electron Gun | B. 蒸发舟/Evaporation Boat | C. 加热丝/Heating Wire | D. 坩埚/Crucible |
| 工艺气体设备（部分）| Process Gas Equipment (Partial) |
1. 质量流量控制器（MFC） Mass Flow Controller (MFC) | 2. 质量流量控制器（MFC） Mass Flow Controller (MFC) | 3. 气体混合器 Gas Mixer |
4. 气体分配系统 Gas Distribution System | 5. 气体净化器 Gas Purifier |
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| 工艺气体系统 | Process Gas System |
1. 精密气体控制 Precision Gas Control | 2. 多通道质量流量控制系统 Multi-Channel Mass Flow Control System | 3. 数字式气体混配器 Digital Gas Mixer |
4. 高压气体减压器 High-Pressure Gas Regulator | 5. 高纯反应气体 High-Purity Reactive Gas | 6. 惰性保护气体 Inert Shielding Gas |
7. 惰性保护气体 Inert Shielding Gas |
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